KLA Corporation's CEO Salary
- Richard Wallace President & Chief Executive Officer at KLA Corporation, received a total compensation of $25.09 M in 2025.
- Bren Higgins Executive Vice President & Chief Financial Officer at KLA Corporation, received a total compensation of $7.71 M in 2025.
- Ahmad Khan President, Semiconductor Products and Customers at KLA Corporation, received a total compensation of $7.71 M in 2025.
- Oreste Donzella Former Executive Vice President and Chief Strategy Officer at KLA Corporation, received a total compensation of $6.54 M in 2025.
- Brian Lorig Executive Vice President, KLA Global Services at KLA Corporation, received a total compensation of $5.00 M in 2025.
- Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary at KLA Corporation, received a total compensation of $3.13 M in 2025.
KLA Corporation's CEO salary and other executives compensation in 2025 was as follows:
Executive Compensation Summary Table
| 2025 | 2024 | 2023 | |
|---|---|---|---|
| Richard Wallace President & Chief Executive Officer | $25.09 M | $22.83 M | $26.64 M |
| Base Salary | $1.19 M | $1.13 M | $1.00 M |
| Incentive Plan Compensation | $3.70 M | $1.98 M | $2.12 M |
| All Other Compensation | $50.09 K | $28.43 K | $28.06 K |
| Stock Award | $20.15 M | $19.70 M | $23.49 M |
| Bren Higgins Executive Vice President & Chief Financial Officer | $7.71 M | $7.45 M | $11.28 M |
| Base Salary | $750.00 K | $758.17 K | $643.46 K |
| Incentive Plan Compensation | $1.43 M | $810.57 K | $875.74 K |
| All Other Compensation | $34.99 K | $28.65 K | $27.66 K |
| Stock Award | $5.49 M | $5.86 M | $9.74 M |
| Ahmad Khan President, Semiconductor Products and Customers | $7.71 M | $7.45 M | $11.57 M |
| Base Salary | $750.00 K | $758.17 K | $650.00 K |
| Incentive Plan Compensation | $1.43 M | $810.57 K | $920.40 K |
| All Other Compensation | $32.63 K | $27.51 K | $26.85 K |
| Stock Award | $5.49 M | $5.86 M | $9.98 M |
| Oreste Donzella Former Executive Vice President and Chief Strategy Officer | $6.54 M | $7.67 M | $5.90 M |
| Base Salary | $362.56 K | $501.25 K | $477.39 K |
| Incentive Plan Compensation | $466.72 K | $407.81 K | $441.80 K |
| All Other Compensation | $4.79 M | $4.96 M | $965.13 K |
| Stock Award | $915.79 K | $1.81 M | $4.01 M |
| Brian Lorig Executive Vice President, KLA Global Services | $5.00 M | $3.78 M | $5.38 M |
| Base Salary | $543.65 K | $521.25 K | $496.73 K |
| Incentive Plan Compensation | $775.86 K | $584.10 K | $506.01 K |
| All Other Compensation | $13.49 K | $10.80 K | $10.58 K |
| Stock Award | $3.66 M | $2.66 M | $4.37 M |
| Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary | $3.13 M | $3.45 M | $4.99 M |
| Base Salary | $555.56 K | $525.00 K | $525.00 K |
| Incentive Plan Compensation | $619.84 K | $495.60 K | $545.16 K |
| All Other Compensation | $30.47 K | $30.13 K | $28.53 K |
| Stock Award | $1.92 M | $2.40 M | $3.89 M |
| Richard Wallace President & Chief Executive Officer | - | $22.83 M | $26.64 M |
| Base Salary | - | $1.13 M | $1.00 M |
| Incentive Plan Compensation | - | $1.98 M | $2.12 M |
| All Other Compensation | - | $28.43 K | $28.06 K |
| Stock Award | - | $19.70 M | $23.49 M |
| Oreste Donzella Executive Vice President and Chief Strategy Officer | - | $7.67 M | $5.90 M |
| Base Salary | - | $501.25 K | $477.39 K |
| Incentive Plan Compensation | - | $407.81 K | $441.80 K |
| All Other Compensation | - | $4.96 M | $965.13 K |
| Stock Award | - | $1.81 M | $4.01 M |
| Bren Higgins Executive Vice President & Chief Financial Officer | - | $7.45 M | $11.28 M |
| Base Salary | - | $758.17 K | $643.46 K |
| Incentive Plan Compensation | - | $810.57 K | $875.74 K |
| All Other Compensation | - | $28.65 K | $27.66 K |
| Stock Award | - | $5.86 M | $9.74 M |
| Ahmad Khan President, Semiconductor Process Control (Semi PC), Electronics, Packaging and Components (EPC), and KLA Instruments | - | $7.45 M | $11.57 M |
| Base Salary | - | $758.17 K | $650.00 K |
| Incentive Plan Compensation | - | $810.57 K | $920.40 K |
| All Other Compensation | - | $27.51 K | $26.85 K |
| Stock Award | - | $5.86 M | $9.98 M |
| Brian Lorig Executive Vice President, Global Support and Services | - | $3.78 M | $5.38 M |
| Base Salary | - | $521.25 K | $496.73 K |
| Incentive Plan Compensation | - | $584.10 K | $506.01 K |
| All Other Compensation | - | $10.80 K | $10.58 K |
| Stock Award | - | $2.66 M | $4.37 M |
| Ahmad Khan President, Semiconductor Process Control | - | - | $11.57 M |
| Base Salary | - | - | $650.00 K |
| Incentive Plan Compensation | - | - | $920.40 K |
| All Other Compensation | - | - | $26.85 K |
| Stock Award | - | - | $9.98 M |
| Oreste Donzella Executive Vice President, Electronics, Packaging & Components | - | - | $5.90 M |
| Base Salary | - | - | $477.39 K |
| Incentive Plan Compensation | - | - | $441.80 K |
| All Other Compensation | - | - | $965.13 K |
| Stock Award | - | - | $4.01 M |
