KLA Corporation's CEO Salary

KLA Corporation's CEO salary and other executives compensation in 2025 was as follows:

Richard Wallace President & Chief Executive Officer at KLA Corporation, received a total compensation of $25.09 M in 2025.
Bren Higgins Executive Vice President & Chief Financial Officer at KLA Corporation, received a total compensation of $7.71 M in 2025.
Ahmad Khan President, Semiconductor Products and Customers at KLA Corporation, received a total compensation of $7.71 M in 2025.
Oreste Donzella Former Executive Vice President and Chief Strategy Officer at KLA Corporation, received a total compensation of $6.54 M in 2025.
Brian Lorig Executive Vice President, KLA Global Services at KLA Corporation, received a total compensation of $5.00 M in 2025.
Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary at KLA Corporation, received a total compensation of $3.13 M in 2025.

CEO/ Executive salary tells one part of the story. Explore Employee Count Trend, Revenue per Employee, and Profit per Employee to understand workforce scale, and employee productivity.

Richard Wallace President & Chief Executive Officer

Per Year
Per Month
Per Week
Per Day

Richard Wallace President & Chief Executive Officer, at KLA Corporation, received $1.19 M in base salary, $20.15 M in stock award, and $50.09 K in other compensation, making $25.09 M in total compensation in 2025.

The total compensation was +9.89% up from the previous year, 2024.

Bren Higgins Executive Vice President & Chief Financial Officer

Per Year
Per Month
Per Week
Per Day

Bren Higgins Executive Vice President & Chief Financial Officer, at KLA Corporation, received $750.00 K in base salary, $5.49 M in stock award, and $34.99 K in other compensation, making $7.71 M in total compensation in 2025.

The total compensation was +3.49% up from the previous year, 2024.

Ahmad Khan President, Semiconductor Products and Customers

Per Year
Per Month
Per Week
Per Day

Ahmad Khan President, Semiconductor Products and Customers, at KLA Corporation, received $750.00 K in base salary, $5.49 M in stock award, and $32.63 K in other compensation, making $7.71 M in total compensation in 2025.

The total compensation was +3.48% up from the previous year, 2024.

Oreste Donzella Former Executive Vice President and Chief Strategy Officer

Per Year
Per Month
Per Week
Per Day

Oreste Donzella Former Executive Vice President and Chief Strategy Officer, at KLA Corporation, received $362.56 K in base salary, $915.79 K in stock award, and $4.79 M in other compensation, making $6.54 M in total compensation in 2025.

The total compensation was -14.84% down from the previous year, 2024.

Brian Lorig Executive Vice President, KLA Global Services

Per Year
Per Month
Per Week
Per Day

Brian Lorig Executive Vice President, KLA Global Services, at KLA Corporation, received $543.65 K in base salary, $3.66 M in stock award, and $13.49 K in other compensation, making $5.00 M in total compensation in 2025.

The total compensation was +32.26% up from the previous year, 2024.

Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary

Per Year
Per Month
Per Week
Per Day

Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary, at KLA Corporation, received $555.56 K in base salary, $1.92 M in stock award, and $30.47 K in other compensation, making $3.13 M in total compensation in 2025.

The total compensation was -9.21% down from the previous year, 2024.

Executive	2025	2024	2023
Richard Wallace President & Chief Executive Officer	$25.09 M	••••••••	••••••••
Base Salary	$1.19 M	••••••••	••••••••
Incentive Plan Compensation	$3.70 M	••••••••	••••••••
All Other Compensation	$50.09 K	••••••••	••••••••
Stock Award	$20.15 M	••••••••	••••••••
Bren Higgins Executive Vice President & Chief Financial Officer	$7.71 M	••••••••	••••••••
Base Salary	$750.00 K	••••••••	••••••••
Incentive Plan Compensation	$1.43 M	••••••••	••••••••
All Other Compensation	$34.99 K	••••••••	••••••••
Stock Award	$5.49 M	••••••••	••••••••
Ahmad Khan President, Semiconductor Products and Customers	$7.71 M	••••••••	••••••••
Base Salary	$750.00 K	••••••••	••••••••
Incentive Plan Compensation	$1.43 M	••••••••	••••••••
All Other Compensation	$32.63 K	••••••••	••••••••
Stock Award	$5.49 M	••••••••	••••••••
Oreste Donzella Former Executive Vice President and Chief Strategy Officer	$6.54 M	••••••••	••••••••
Base Salary	$362.56 K	••••••••	••••••••
Incentive Plan Compensation	$466.72 K	••••••••	••••••••
All Other Compensation	$4.79 M	••••••••	••••••••
Stock Award	$915.79 K	••••••••	••••••••
Brian Lorig Executive Vice President, KLA Global Services	$5.00 M	••••••••	••••••••
Base Salary	$543.65 K	••••••••	••••••••
Incentive Plan Compensation	$775.86 K	••••••••	••••••••
All Other Compensation	$13.49 K	••••••••	••••••••
Stock Award	$3.66 M	••••••••	••••••••
Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary	$3.13 M	••••••••	••••••••
Base Salary	$555.56 K	••••••••	••••••••
Incentive Plan Compensation	$619.84 K	••••••••	••••••••
All Other Compensation	$30.47 K	••••••••	••••••••
Stock Award	$1.92 M	••••••••	••••••••
Oreste Donzella Executive Vice President and Chief Strategy Officer	-	••••••••	••••••••
Base Salary	-	••••••••	••••••••
Incentive Plan Compensation	-	••••••••	••••••••
All Other Compensation	-	••••••••	••••••••
Stock Award	-	••••••••	••••••••
Ahmad Khan President, Semiconductor Process Control (Semi PC), Electronics, Packaging and Components (EPC), and KLA Instruments	-	••••••••	••••••••
Base Salary	-	••••••••	••••••••
Incentive Plan Compensation	-	••••••••	••••••••
All Other Compensation	-	••••••••	••••••••
Stock Award	-	••••••••	••••••••
Brian Lorig Executive Vice President, Global Support and Services	-	••••••••	••••••••
Base Salary	-	••••••••	••••••••
Incentive Plan Compensation	-	••••••••	••••••••
All Other Compensation	-	••••••••	••••••••
Stock Award	-	••••••••	••••••••
Ahmad Khan President, Semiconductor Process Control	-	••••••••	••••••••
Base Salary	-	••••••••	••••••••
Incentive Plan Compensation	-	••••••••	••••••••
All Other Compensation	-	••••••••	••••••••
Stock Award	-	••••••••	••••••••
Oreste Donzella Executive Vice President, Electronics, Packaging & Components	-	••••••••	••••••••
Base Salary	-	••••••••	••••••••
Incentive Plan Compensation	-	••••••••	••••••••
All Other Compensation	-	••••••••	••••••••
Stock Award	-	••••••••	••••••••

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KLA Corporation's CEO Salary

Richard Wallace President & Chief Executive Officer

Bren Higgins Executive Vice President & Chief Financial Officer

Ahmad Khan President, Semiconductor Products and Customers

Oreste Donzella Former Executive Vice President and Chief Strategy Officer

Brian Lorig Executive Vice President, KLA Global Services

Mary Beth Wilkinson Executive Vice President, Chief Legal Officer & Corporate Secretary

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